Laser induced backside wet etching of fused silica absorption coefficient dependence /

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Bibliographic Details
Main Authors: Vass Csaba
Hopp Béla
Smausz Tomi
Format: Article
Published: SPIE - The International Society for Optical Engineering 2003
Series:PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING 5131
doi:10.1117/12.513623

mtmt:1084034
Online Access:http://publicatio.bibl.u-szeged.hu/9099
Description
Physical Description:200-204
ISSN:0277-786X