Smooth vanadium-nitride layers created on silicon substrates by puse layer deposition methodes
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| Main Authors: | |
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| Format: | Article |
| Published: |
1998
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| Series: | PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
3573 |
| Subjects: | |
| mtmt: | 1077658 |
| Online Access: | http://publicatio.bibl.u-szeged.hu/5563 |
| Physical Description: | 104-107 |
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| ISSN: | 0277-786X |