Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry

Lohner Tivadar, Németh Attila, Zolnai Zsolt, Kalas Benjamin, Romanenko Alekszej, Nguyen Quoc Khánh, Szilágyi Edit, Kótai Endre, Agócs Emil, Tóth Zsolt, Budai Judit, Petrik Péter, Fried Miklós, Bársony István, Gyulai József
2022