Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques
Two methods for micro-structuring of transparent dielectric were compared in this study: the two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) and the two beam in-terferometric ablation by ultrashort laser pulses. In TWIN-LIBWE we used the 4th harmonic of Nd:YAG laser (λ=266 n...
Elmentve itt :
Szerzők: |
Vass Csaba Kiss Bálint Flender Roland Felházi Zoltán Lorenz Pierre Erhardt Martin Zimmer Klaus |
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Dokumentumtípus: | Cikk |
Megjelent: |
2015
|
Sorozat: | JOURNAL OF LASER MICRO NANOENGINEERING
10 No. 1 |
doi: | 10.2961/jlmn.2015.01.0008 |
mtmt: | 2854483 |
Online Access: | http://publicatio.bibl.u-szeged.hu/7938 |
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