Comparative study on grating fabrication in transparent materials by TWIN-LIBWE and ultrashort pulsed ablation techniques

Two methods for micro-structuring of transparent dielectric were compared in this study: the two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) and the two beam in-terferometric ablation by ultrashort laser pulses. In TWIN-LIBWE we used the 4th harmonic of Nd:YAG laser (λ=266 n...

Teljes leírás

Elmentve itt :
Bibliográfiai részletek
Szerzők: Vass Csaba
Kiss Bálint
Flender Roland
Felházi Zoltán
Lorenz Pierre
Erhardt Martin
Zimmer Klaus
Dokumentumtípus: Cikk
Megjelent: 2015
Sorozat:JOURNAL OF LASER MICRO NANOENGINEERING 10 No. 1
doi:10.2961/jlmn.2015.01.0008

mtmt:2854483
Online Access:http://publicatio.bibl.u-szeged.hu/7938

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