Influence of the confinement on laser-induced dry etching at the rear side of fused silica

Pan Yunxiang, Ehrhardt Martin, Lorenz Pierre, Han Bing, Hopp Béla, Vass Csaba, Ni Xiaowu, Zimmer Klaus
2016

Multi-pulse LIBDE of fused silica at different thicknesses of the organic absorber layer

Pan Yunxiang, Ehrhardt Martin, Lorenz Pierre, Han Bing, Hopp Béla, Vass Csaba, Ni Xiaowu, Zimmer Klaus
2015